Title:
Fabrication of Micro/Nano Structures via Precision Machining Modelling, Processing and Evaluation
Author:
Zhang, Guoqing. editor.
ISBN:
9789819913381
Edition:
1st ed. 2023.
Physical Description:
XII, 398 p. 276 illus., 221 illus. in color. online resource.
Contents:
Chapter 1. Introduction, Yuting Ma, Shuaikang Cao and Guoqing Zhang -- Chapter 2. Tool offset flycutting straight-groove-type micro structures, Jianpeng Wang and Guoqing Zhang -- Chapter 3. Tool offset flycutting multi-layer hierarchical microstructures, Shuai Ma and Guoqing Zhang -- Chapter 4. Tool offset flycutting micro-optics arrays with high-aspect-ratio, Zhanwen Sun and Suet To -- Chapter 5. Diamond milling system for fabricating infrared micro-optics arrays, Zhanwen Sun and Sujuan Wang -- Chapter 6. Cutting force and energy modelling in ultra-precision machining of micro-structures, Zhejia Zhao, Zhanwen Sun and Suet To.
Added Corporate Author:
Electronic Access:
https://doi.org/10.1007/978-981-99-1338-1Copies:
Available:*
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