Cover image for Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
Title:
Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
Author:
Cao, Huiliang. author.
ISBN:
9789811992476
Edition:
1st ed. 2023.
Physical Description:
X, 224 p. 200 illus., 137 illus. in color. online resource.
Contents:
Chapter 1 Introduction -- Chapter 2 Silicon-based MEMS gyroscope structure and working principle -- Chapter 3 Silicon-based MEMS gyroscope structure noise analysis and system model -- Chapter 4 Silicon-based MEMS gyroscope quadrature error correction technology and optimization -- Chapter 5 Silicon-based MEMS gyroscope sense closed loop and frequency tuning technology -- Chapter 6 Temperature influence on MEMS gyroscope and suppression method -- Chapter 7 Silicon-based MEMS gyroscope monitoring circuit design and test technology -- References.
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