Title:
Dry Etching Technology for Semiconductors
Author:
Nojiri, Kazuo. author.
ISBN:
9783319102955
Edition:
1st ed. 2015.
Physical Description:
XIII, 116 p. 123 illus. online resource.
Contents:
Contribution of Dry Etching Technology to Progress of Semiconductor Integrated Circuit -- Mechanism of Dry Etching -- Dry Etching of Various Materials -- Dry Etching Equipments -- Dry Etching Damage -- Latest Dry Etching Technologies -- Future Challenges and Outlook for Dry Etching Technology.
Added Corporate Author:
Electronic Access:
https://doi.org/10.1007/978-3-319-10295-5Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 530002-1001 | ONLINE | Searching... | Searching... |