Cover image for Introduction to Microsystem Design
Title:
Introduction to Microsystem Design
Author:
Schomburg, Werner Karl. author.
ISBN:
9783662470237
Edition:
2nd ed. 2015.
Physical Description:
XXIV, 374 p. 380 illus., 332 illus. in color. online resource.
Series:
RWTHedition,
Contents:
Scaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Electrical Measurements -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies of physical domains -- Mechanical devices for electronics.
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