Cover image for Micro electro mechanical system design
Title:
Micro electro mechanical system design
Author:
Allen, James J., author.
ISBN:
9780429116865
Physical Description:
1 online resource (465 pages).
Series:
Mechanical engineering ; Volume 192

Mechanical engineering (Taylor & Francis) ; Volume 192.
Contents:
chapter 1 Chapter 1 -- chapter 2 Chapter 2 -- chapter 3 Chapter 3 -- chapter 4 Chapter 4 -- chapter 5 Chapter 5 -- chapter 6 Chapter 6 -- chapter 7 Chapter 7 -- chapter 8 Chapter 8 -- chapter 9 Chapter 9 -- chapter 10 Chapter 10.
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E-Book 543812-1001 TK153 .A47 2005
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