Micro-and Nanomechanics, Volume 5 of the Proceedings of the 2016 SEM Annual Conference & Exposition on Experimental and Applied Mechanics, the fifth volume of ten from the Conference, brings together contributions to this important area of research and engineering. The collection presents early findings and case studies on a wide range of areas, including: MEMS: Materials & Interfaces Microscale & Microstructural Effects on Mechanical Behavior Novel Nano-scale Probes Nanoindentation & Beyond Nanomechanics Dynamic Micro/Nano Mechanics.