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13. 
Cover image for Enabling technology for MEMS and nanodevices
Enabling technology for MEMS and nanodevices
Author 
Baltes, H. (Henry) Wiley InterScience (Online service)
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ONLINE
Electronic Access 
John Wiley http://dx.doi.org/10.1002/9783527616701
HathiTrust Digital Library, Limited view (search only) http://catalog.hathitrust.org/api/volumes/oclc/55807757.html
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Online Library~1
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