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25. 
Cover image for Fabrication and design of resonant microdevices
Fabrication and design of resonant microdevices
Author 
Bahreyni, Behraad.
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ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780815515777
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26. 
Cover image for MEMS design and fabrication
MEMS design and fabrication
Author 
Gad-el-Hak, Mohamed, 1945-
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Electronic Access 
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27. 
Cover image for MEMS Packaging
MEMS Packaging
Author 
Tai-Ran Hsu, ed.
Preferred Shelf Number 
ONLINE
Electronic Access 
http://dx.doi.org/10.1049/PBEP003E
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28. 
Cover image for The mechatronics handbook
The mechatronics handbook
Author 
Bishop, Robert H., 1957- ISA--The Instrumentation, Systems, and Automation Society.
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ONLINE
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