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Cover image for Ion implantation in semiconductors, silicon and germanium
Ion implantation in semiconductors, silicon and germanium
Author 
Mayer, James W., 1930- Eriksson, Lennart, 1938- author. Davies, John Arthur, 1927- author.
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ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780124808508
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