Limit Search Results
Author
SpringerLink (Online service)
(5)
Wiley InterScience (Online service)
(4)
Feng, Zhe Chuan.
(2)
Kyung, Chong-Min. editor.
(2)
Lin, Youn-Long. editor.
(2)
Language
Publication Date
-
Subject
Microelectronics -- Materials.
(8)
Electronic books.
(4)
Microelectronics.
(4)
Electronic Circuits and Systems.
(3)
Electronic circuits.
(3)
Material Type
Shelf Location
Library
Switch to list view
Switch to thumbnail view
Select an Action
40 Results Found Subscribe to search results
0000DEFAULT
Print
1. 
Cover image for Chemical mechanical planarization of microelectronic materials
Chemical mechanical planarization of microelectronic materials
Author 
Steigerwald, Joseph M. Murarka, S. P. Gutmann, Ronald J. Wiley InterScience (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
John Wiley http://dx.doi.org/10.1002/9783527617746
Contributor biographical information http://catdir.loc.gov/catdir/bios/wiley041/96006198.html
Format: 
Availability 
Online Library~1
Available:
Copies:
2. 
Cover image for Polymers for microelectronics : resists and dielectrics
Polymers for microelectronics : resists and dielectrics
Author 
Thompson, L. F., 1944- Willson, C. G. (C. Grant) 1939- Tagawa, Seiichi.
Preferred Shelf Number 
TK7871.15.P6 P65 1994
Format: 
Availability 
Beytepe Library~1
Available:
Copies:
3. 
Cover image for Polymeric materials for microelectronic applications : science and technology
Polymeric materials for microelectronic applications : science and technology
Author 
Ito, Hiroshi, ed. Tagawa, Seichi, ed. Horie, Kazuyuki, 1941- Kåobunshi Gakkai (Japan). Polymers for Microelectronics and Photonics Group. American Chemical Society. Division of Polymeric Materials: Science and Engineering.
Preferred Shelf Number 
TK 7871.15.P6 P59 1994
Format: 
Availability 
Beytepe Library~2
Available:
Copies:
4. 
Cover image for Dry etching for microelectronics
Dry etching for microelectronics
Author 
Powell, Ronald A.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780444869050
Format: 
Availability 
Online Library~1
Available:
Copies:
Select an Action