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Cover image for Dielectric films for advanced microelectronics
Title:
Dielectric films for advanced microelectronics
Author:
Baklanov, Mikhail.
ISBN:
9780470017944

9780470065419
Publication Information:
Chichester, England ; Hoboken, NJ : John Wiley & Sons, c2007.
Physical Description:
1 online resource (xxii, 486 p.) : ill.
Series:
Wiley series in materials for electronic and optoelectronic applications
Series Title:
Wiley series in materials for electronic and optoelectronic applications
Added Corporate Author:
Electronic Access:
John Wiley http://dx.doi.org/10.1002/9780470017944
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