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Cover image for Handbook of silicon wafer cleaning technology
Title:
Handbook of silicon wafer cleaning technology
Author:
Reinhardt, Karen A., editor.
ISBN:
9780323510851

9780323510844
Edition:
Third edition.
Physical Description:
1 online resource
Series:
Materials science & process technology series

Materials science and process technology series.
Subject Term:
Silicon-on-insulator technology.
Added Author:
Reinhardt, Karen A.,

Kern, Werner, 1925-
Electronic Access:
ScienceDirect https://www.sciencedirect.com/science/book/9780323510844
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Copies:

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