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Cover image for Chemical mechanical planarization of microelectronic materials
Title:
Chemical mechanical planarization of microelectronic materials
Author:
Steigerwald, Joseph M.
ISBN:
9783527617746
Publication Information:
New York : J. Wiley, c1997.
Physical Description:
xiii, 324 p. : ill. ; 24 cm.
Added Corporate Author:
Electronic Access:
John Wiley http://dx.doi.org/10.1002/9783527617746
Contributor biographical information http://catdir.loc.gov/catdir/bios/wiley041/96006198.html
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