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Cover image for Polymers for microelectronics : resists and dielectrics
Title:
Polymers for microelectronics : resists and dielectrics
Author:
Thompson, L. F., 1944-
ISBN:
9780841227217
Publication Information:
Washington : American Chemical Society, 1994.
Physical Description:
xii, 571 s. : şkl.
Series:
ACS symposium series, 0097-6156 ;
Series Title:
ACS symposium series, 0097-6156 ; 537
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Copies:

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Book 7.2/12/426332 TK7871.15.P6 P65 1994
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