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Cover image for Poly-SiGe for MEMS-above-CMOS Sensors
Title:
Poly-SiGe for MEMS-above-CMOS Sensors
Author:
Gonzalez Ruiz, Pilar. author.
ISBN:
9789400767997
Edition:
1st ed. 2014.
Physical Description:
XVI, 199 p. online resource.
Series:
Springer Series in Advanced Microelectronics, 44
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