Title:
A practical guide to optical metrology for thin films
Author:
Quinten, Michael.
ISBN:
9783527664344
9783527664351
9781299475991
Publication Information:
Weinheim : Wiley-VCH ; Chichester : John Wiley [distributor], 2012.
Physical Description:
1 online resource : ill.
Subject Term:
Genre:
Electronic Access:
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John Wiley http://dx.doi.org/10.1002/9783527664344
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