Title:
Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS
Author:
Adachi, Hideaki.
ISBN:
9781437734836
Edition:
2nd ed.
Publication Information:
Waltham, MA : William Andrew, c2012.
Physical Description:
1 online resource.
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9781437734836Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 145479-2001 | ONLINE | Searching... | Searching... |