Title:
Reactive Sputter Deposition
Author:
Depla, Diederik. editor.
ISBN:
9783540766643
Physical Description:
online resource.
Series:
Springer Series in Materials Science, 109
Series Title:
Springer Series in Materials Science, 0933-033X ; 109
Added Author:
Added Corporate Author:
Electronic Access:
http://dx.doi.org/10.1007/978-3-540-76664-3Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 187650-2001 | ONLINE | Searching... | Searching... |