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Cover image for MEMS Materials and Processes Handbook
Title:
MEMS Materials and Processes Handbook
Author:
Ghodssi, Reza. editor.
ISBN:
9780387473185
Physical Description:
XXXVI, 1188p. 200 illus.. In 2 volumes, not available separately. online resource.
Series:
MEMS Reference Shelf, 1
Series Title:
MEMS Reference Shelf, 1936-4407 ; 1
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