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Cover image for Defects in High-k Gate Dielectric Stacks Nano-Electronic Semiconductor Devices
Title:
Defects in High-k Gate Dielectric Stacks Nano-Electronic Semiconductor Devices
Author:
Gusev, Evgeni. editor.
ISBN:
9781402043673
Physical Description:
X, 492 p. online resource.
Series:
NATO Science Series II: Mathematics, Physics and Chemistry, 220
Series Title:
NATO Science Series II: Mathematics, Physics and Chemistry, 1568-2609 ; 220
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