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Cover image for Advances in CMP/polishing technologies for the manufacture of electronic devices
Title:
Advances in CMP/polishing technologies for the manufacture of electronic devices
Author:
Doi, Toshiro.
ISBN:
9781437778595
Edition:
1st ed.
Publication Information:
Oxford : William Andrew, 2012.
Physical Description:
1 online resource (xii, 317 p.)
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Copies:

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