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Cover image for ULSI semiconductor technology atlas
Title:
ULSI semiconductor technology atlas
Author:
Tung, Chih-Hang, 1963-
ISBN:
9780471457725

9780471668794
Publication Information:
Hoboken, NJ : John Wiley, 2003.
Physical Description:
xii, 666 p. : ill. ; 26 cm.
Subject Term:
Integrated circuits -- Ultra large scale integration -- Atlases.

Electron microscopy.
Added Author:
Sheng, George T. T.

Lu, Chih-Yuan, 1950-
Added Corporate Author:
John Wiley & Sons.
Electronic Access:
John Wiley http://dx.doi.org/10.1002/0471668796
Contributor biographical information http://catdir.loc.gov/catdir/bios/wiley046/2003049661.html
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