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Cover image for Handbook of sputter deposition technology : principles, technology and applications
Title:
Handbook of sputter deposition technology : principles, technology and applications
Author:
Wasa, Kiyotaka.
ISBN:
9780815512806
Publication Information:
Park Ridge, N. J. : Noyes, 1992.
Physical Description:
xii 304 s.
Holds:
Copies:

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Book 7.2/12/596517 TS 695 W37 1992
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