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1. 
Cover image for Handbook of thin film deposition
Handbook of thin film deposition
Author 
Seshan, Krishna, editor. Schepis, Dominic, editor.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect https://www.sciencedirect.com/science/book/9780128123119
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2. 
Cover image for Ionized physical vapor deposition
Ionized physical vapor deposition
Author 
Hopwood, Jeffrey A.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780125330275
Format: 
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3. 
Cover image for PVD for microelectronics sputter deposition applied to semiconductor manufacturing
PVD for microelectronics sputter deposition applied to semiconductor manufacturing
Author 
Powell, Ronald A. Rossnagel, Stephen M.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780125330268
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4. 
Cover image for Laser microfabrication thin film processes and lithography
Laser microfabrication thin film processes and lithography
Author 
Ehrlich, Daniel J. Tsao, Jeffrey Y.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780122334306
Format: 
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