Search Results for Microlithography.

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Shelf Location: Electronic Library

Author

Wiley InterScience (Online service)

(3)

Helbert, John N.

(2)

Köhler, J. M. (J. Michael), 1956-

(2)

Arce, Gonzalo R.

(1)

Ehrlich, Daniel J.

(1)

Eynon, Benjamin G.

(1)

Glendinning, William B.

(1)

John Wiley & Sons.

(1)

Lawson, Richard, editor.

(1)

(1)

(1)

Robinson, Alex, editor.

(1)

Smith, Bruce W., 1959-

(1)

Suzuki, Kazuaki.

(1)

Tsao, Jeffrey Y.

(1)

(1)

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(9)

(1)

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-

(2)

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Subject

Microlithography.

(7)

Masks (Electronics)

(3)

Electronic books.

(2)

Integrated circuits -- Masks.

(2)

Integrated circuits -- Very large scale integration.

(2)

Microlithography -- Industrial applications.

(2)

Plasma etching.

(2)

Integrated circuits -- Design and construction -- Mathematics.

(1)

Integrated circuits -- Design and construction.

(1)

Lasers -- Industrial applications.

(1)

Lithographie (Halbleitertechnologie)

(1)

Manufacturing processes.

(1)

Metal oxide semiconductors, Complementary -- Design and construction.

(1)

Microfabrication.

(1)

Microlithography -- Mathematics.

(1)

Photolithographie (Halbleitertechnologie)

(1)

Photolithography -- Mathematics.

(1)

(1)

Resolution (Optics)

(1)

Semiconductors -- Etching -- Mathematics.

(1)

Thin film devices -- Design and construction.

(1)

(1)

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1.

Cover image for Microlithography science and technology

Microlithography science and technology

Microlithography science and technology

Author

Suzuki, Kazuaki. Smith, Bruce W., 1959-

Preferred Shelf Number

ONLINE

Electronic Access

Distributed by publisher. Purchase or institutional license may be required for access.

Format:

Availability

Online Library~1

Available:
Copies:

2.

Cover image for Handbook of VLSI microlithography principles, technology, and applications

Handbook of VLSI microlithography principles, technology, and applications

Handbook of VLSI microlithography principles, technology, and applications

Author

Helbert, John N.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9780815514442

Format:

Availability

Online Library~1

Available:
Copies:

3.

Cover image for Handbook of VLSI microlithography principles, technology, and applications

Handbook of VLSI microlithography principles, technology, and applications

Handbook of VLSI microlithography principles, technology, and applications

Author

Glendinning, William B. Helbert, John N.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9780815512813

Format:

Availability

Online Library~1

Available:
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4.

Cover image for Materials and Processes for Next Generation Lithography.

Materials and Processes for Next Generation Lithography.

Materials and Processes for Next Generation Lithography.

Author

Robinson, Alex, editor. Lawson, Richard, editor.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect https://www.sciencedirect.com/science/bookseries/18762778/11

Format:

Availability

Online Library~1

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5.

Cover image for Photomask fabrication technology

Photomask fabrication technology

Photomask fabrication technology

Author

Eynon, Benjamin G. Wu, Banqiu.

Preferred Shelf Number

ONLINE

Electronic Access

Subscription required

Format:

Availability

Online Library~1

Available:
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6.

Cover image for Computational lithography

Computational lithography

Computational lithography

Author

Ma, Xu, 1983- Arce, Gonzalo R. Wiley InterScience (Online service)

Preferred Shelf Number

ONLINE

Electronic Access

Available by subscription from Safari Books Online
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=588875
John Wiley http://dx.doi.org/10.1002/9780470618943
Books24x7 http://www.books24x7.com/marc.asp?bookid=36422
Volltext http://proquest.tech.safaribooksonline.de/9781118043578

Format:

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Online Library~1

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7.

Cover image for Fundamental principles of optical lithography the science of microfabrication

Fundamental principles of optical lithography the science of microfabrication

Fundamental principles of optical lithography the science of microfabrication

Author

Mack, Chris A. Wiley InterScience (Online service)

Preferred Shelf Number

ONLINE

Electronic Access

John Wiley http://dx.doi.org/10.1002/9780470723876

Format:

Availability

Online Library~1

Available:
Copies:

8.

Cover image for Etching in microsystem technology

Etching in microsystem technology

Etching in microsystem technology

Author

Köhler, J. M. (J. Michael), 1956- Wiley InterScience (Online service)

Preferred Shelf Number

ONLINE

Electronic Access

John Wiley http://dx.doi.org/10.1002/9783527613786

Format:

Availability

Online Library~1

Available:
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9.

Cover image for Ätzverfahren für die Mikrotechnik

Ätzverfahren für die Mikrotechnik

Ätzverfahren für die Mikrotechnik

Author

Köhler, J. M. (J. Michael), 1956- John Wiley & Sons.

Preferred Shelf Number

ONLINE

Electronic Access

John Wiley http://dx.doi.org/10.1002/3527602917

Format:

Availability

Online Library~1

Available:
Copies:

10.

Cover image for Laser microfabrication thin film processes and lithography

Laser microfabrication thin film processes and lithography

Laser microfabrication thin film processes and lithography

Author

Ehrlich, Daniel J. Tsao, Jeffrey Y.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9780122334306

Format:

Availability

Online Library~1

Available:
Copies:

1

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