Title:
Micromechanics and MEMS classic and seminal papers to 1990
Author:
Trimmer, W.
ISBN:
9780470545263
Publication Information:
New York : IEEE Press, 1997.
Physical Description:
1 online resource (xv, 701 p.) : ill.
Genre:
Added Author:
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Electronic Access:
IEEE Xplore http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520Copies:
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