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Cover image for Micro mechanical systems principles and technology
Title:
Micro mechanical systems principles and technology
Author:
Fukuda, T. (Toshio), 1948-
ISBN:
9780444823632
Publication Information:
Amsterdam ; New York : Elsevier, 1998.
Physical Description:
1 online resource (viii, 268 p.) : ill.
Series:
Handbook of sensors and actuators ; v. 6
Series Title:
Handbook of sensors and actuators ; v. 6
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