Title:
Etching in microsystem technology
Author:
Köhler, J. M. (J. Michael), 1956-
ISBN:
9783527613786
Uniform Title:
Ätzverfahren für die Mikrotechnik. English
Publication Information:
Weinheim ; New York : Wiley-VCH, c1999.
Physical Description:
xvi, 368 p. : ill. ; 25 cm.
Added Corporate Author:
Electronic Access:
John Wiley http://dx.doi.org/10.1002/9783527613786Copies:
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Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 300698-1001 | ONLINE | Searching... | Searching... |