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Cover image for Handbook of chemical vapor depostion [i.e. deposition] (CVD) principles, technology, and applications
Title:
Handbook of chemical vapor depostion [i.e. deposition] (CVD) principles, technology, and applications
Author:
Pierson, Hugh O.
ISBN:
9780815514329
Edition:
2nd ed.
Publication Information:
Norwich, N.Y. : Noyes Publications/William Andrew Pub., c1999.
Physical Description:
1 online resource (xxiv, 482 p.) : ill.
Series:
Materials science and process technology series
Series Title:
Materials science and process technology series
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