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Cover image for Handbook of silicon semiconductor metrology
Title:
Handbook of silicon semiconductor metrology
Author:
Diebold, A. C. (Alain C.)
ISBN:
9780203904541
Publication Information:
New York : Marcel Dekker, 2001.
Physical Description:
xvi, 874 p. : ill.
Subject Term:
Semiconductors -- Measurement.

Semiconductors -- Inspection.
Added Author:
Diebold, A. C. (Alain C.)
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