Title:
Handbook of thin-film deposition processes and techniques principles, methods, equipment and applications
Author:
Seshan, Krishna.
ISBN:
9781591241935
9780815517788
9780815514428
9780815517764
Edition:
2nd ed.
Publication Information:
Norwich, N.Y. : Noyes Publications/William Andrew Pub., c2002.
Physical Description:
1 online resource (xxviii, 629 p.) : ill.
Series:
Materials science and process technology series. Electronic materials and process technology
Series Title:
Materials science and process technology series. Electronic materials and process technology
Genre:
Added Author:
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780815514428Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 251775-1001 | ONLINE | Searching... | Searching... |