Title:
Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures
Author:
Frühauf, Joachim. author.
ISBN:
9783540268765
Physical Description:
XII, 221 p. 165 illus. online resource.
Added Corporate Author:
Electronic Access:
http://dx.doi.org/10.1007/b138230Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 181056-2001 | ONLINE | Searching... | Searching... |