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Cover image for Micro electro mechanical system design
Title:
Micro electro mechanical system design
Author:
Allen, James J.
ISBN:
9781420027754
Publication Information:
Boca Raton : Taylor & Francis, 2005.
Physical Description:
465 p. : ill.
Series:
Mechanical engineering ; 192
Series Title:
Mechanical engineering ; 192
Subject Term:
Microelectromechanical systems -- Design and construction.

Engineering design.
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