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Cover image for MEMS : introduction and fundamentals
Title:
MEMS : introduction and fundamentals
Author:
Gad-el-Hak, Mohamed, 1945-
ISBN:
9780429125454
Edition:
Second edition.
Physical Description:
1 online resource (488 pages)
Series:
Mechanical engineering series

The MEMS handbook

Mechanical engineering series (Boca Raton, Fla.)
General Note:
One of three parts whose previous edition was a published as a single volume.
Contents:
chapter 1 Introduction -- chapter 2 Scaling of Micromechanical Devices -- chapter 3 Mechanical Properties of MEMS Materials -- chapter 4 Flow Physics -- chapter 5 Integrated Simulation for MEMS -- chapter 6 Molecular-Based Microfluidic Simulation Models -- chapter 7 Hydrodynamics of Small-Scale Internal Gaseous Flows -- chapter 8 Burnett Simulations of Flows in Microdevices -- chapter 9 Lattice Boltzmann Simulations of Slip Flow in Microchannels -- chapter 10 Liquid Flows in Microchannels -- chapter 11 Lubrication in MEMS -- chapter 12 Physics of Thin Liquid Films -- chapter 13 Bubble/Drop Transport in Microchannels -- chapter 14 Fundamentals of Control Theory -- chapter 15 Model-Based Flow Control for Distributed Architectures -- chapter 16 Soft Computing in Control.
Electronic Access:
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E-Book 538899-1001 TK7875 .M43 2006
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