Title:
Plasma electronics : applications in microelectronic device fabrication
Author:
Makabe, T. (Toshiaki), author.
ISBN:
9780429193316
Physical Description:
1 online resource (339 pages)
Series:
Series in plasma physics
Contents:
chapter 1 Introduction -- chapter 2 Phenomenological Description of the Charged Particle Transport -- chapter 3 Macroscopic Plasma Characteristics -- chapter 4 Elementary Processes in Gas Phase and on Surfaces -- chapter 5 The Boltzmann Equation and Transport Equations of Charged Particles -- chapter 6 General Properties of Charged Particle Transport in Gases -- chapter 7 Modeling of Nonequilibrium (Low-Temperature) Plasmas -- chapter 8 Numerical Procedure of Modeling -- chapter 9 Capacitively Coupled Plasma -- chapter 10 Inductively Coupled Plasma -- chapter 11 Magnetically Enhanced Plasma -- chapter 12 Plasma Processing and Related Topics.
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Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 540197-1001 | TA2020 .M35 2006 | Searching... | Searching... |