Title:
Handbook of surface and nanometrology
Author:
Whitehouse, D. J. (David J.)
ISBN:
9781420082029
Edition:
2nd ed.
Publication Information:
Boca Raton : CRC Press, 2011.
Physical Description:
xxiii, 975 p. : ill.
Contents:
ch. 1. Introduction : surface and nanometrology -- ch. 2. Characterization -- ch. 3. Processing, operations, and simulations -- ch. 4. Measurement techniques -- ch. 5. Standardization, traceability, uncertainty -- ch. 6. Surfaces and manufacture -- ch. 7. Surface geometry and its importance in function -- ch. 8. Surface geometry, scale of size effects, nanometrology -- ch. 9. General comments.
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