Title:
Materials and Processes for Next Generation Lithography.
Author:
Robinson, Alex, editor.
ISBN:
9780081003589
Publication Information:
Amsterdam, Netherlands : Elsevier, 2016.
Physical Description:
1 online resource
Series:
Frontiers of nanoscience, v. 11
Frontiers of nanoscience ; v. 11.
Electronic Access:
ScienceDirect https://www.sciencedirect.com/science/bookseries/18762778/11Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 459226-1001 | ONLINE | Searching... | Searching... |