Title:
Advances in chemical mechanical planarization (CMP)
Author:
Babu, S. V., editor.
ISBN:
9780081002186
Physical Description:
1 online resource.
Series:
Woodhead publishing series in electronic and optical materials ; number 86
Woodhead Publishing series in electronic and optical materials ; no. 86.
Added Author:
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9780081001653Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 458681-1001 | ONLINE | Searching... | Searching... |