Title:
Tribology in chemical-mechanical planarization
Author:
Liang, Hong, 1961, author.
ISBN:
9780429120084
Physical Description:
1 online resource (185 pages)
Contents:
chapter 1 Introduction -- chapter 2 Surface properties -- chapter 3 Friction -- chapter 4 Lubrication -- chapter 5 Wear in CMP -- chapter 6 Force transmission -- chapter 7 CMP pads -- chapter 8 Post-CMP cleaning.
Added Author:
Electronic Access:
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Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 541863-1001 | TJ1075 .L49 2005 | Searching... | Searching... |