Title:
Nanoparticle engineering for chemical-mechanical planarization fabrication of next-generation nanodevices
Author:
Paik, Ungyu.
ISBN:
9781420059137
Publication Information:
Boca Raton : Taylor & Francis, 2009.
Physical Description:
xiii, 191 p., [14] p. of plates : ill. (some col.).
Added Author:
Holds:
Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 290562-1001 | ONLINE | Searching... | Searching... |