Title:
Dielectric films for advanced microelectronics
Author:
Baklanov, Mikhail.
ISBN:
9780470017944
9780470065419
Publication Information:
Chichester, England ; Hoboken, NJ : John Wiley & Sons, c2007.
Physical Description:
1 online resource (xxii, 486 p.) : ill.
Series:
Wiley series in materials for electronic and optoelectronic applications
Series Title:
Wiley series in materials for electronic and optoelectronic applications
Added Corporate Author:
Electronic Access:
John Wiley http://dx.doi.org/10.1002/9780470017944Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 296648-1001 | ONLINE | Searching... | Searching... |