Title:
Advances in CMP/polishing technologies for the manufacture of electronic devices
Author:
Doi, Toshiro.
ISBN:
9781437778595
Edition:
1st ed.
Publication Information:
Oxford : William Andrew, 2012.
Physical Description:
1 online resource (xii, 317 p.)
Electronic Access:
ScienceDirect http://www.sciencedirect.com/science/book/9781437778595Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 146106-2001 | ONLINE | Searching... | Searching... |