Title:
Nano-CMOS gate dielectric engineering
Author:
Wong, Hei., author.
ISBN:
9781439849606
Physical Description:
1 online resource (xiv, 234 pages)
Contents:
1. Overview of CMOS technology -- 2. High-k dielectrics -- 3. Complex forms of high-k oxides -- 4. Dielectric interfaces -- 5. Impacts on device operation -- 6. Fabrication issues -- 7. Conclusions.
Electronic Access:
Click here to view.Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 541476-1001 | TK7871.99 .M44 W66 2012 | Searching... | Searching... |