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Title:
The chemistry of metal CVD
Author:
Kodas, Toivo T. (Toivo Tarmo), 1958-
ISBN:
9783527615858
Publication Information:
Weinheim ; New York : VCH, c1994.
Physical Description:
xxiv, 530 p. : ill. ; 25 cm.
Subject Term:
Electronic circuit design.

Chemical vapor deposition.

Metallic films.
Added Author:
Kodas, Toivo T. (Toivo Tarmo), 1958-

Hampden-Smith, Mark J.
Added Corporate Author:
Wiley InterScience (Online service)
Electronic Access:
John Wiley http://dx.doi.org/10.1002/9783527615858
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