Title:
Handbook of microlithography, micromachining, and microfabrication
Author:
Rai-Choudhury, P.
ISBN:
9780819423788
9780819423795
Publication Information:
Bellingham, Wash., USA : SPIE Optical Engineering Press ; London, UK : Institution of Electrical Engineers, c1997.
Physical Description:
v.
Series:
IEE materials and devices series ; 12A-12B
IEE materials & devices series ; 12A-12B.
Contents:
v. 1. Microlithography -- v. 2. Micromachining and microfabrication.
Added Author:
Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | Book | 7.2/18/28964 | TK7836 H3423 1997 V.1 | Searching... | Searching... |
Searching... | Book | 7.2/19/22845 | TK7836 H3423 1997 V.2 | Searching... | Searching... |