1. Nanosphere lithography for high-density nanopatterning / Hirotaka Oshima -- 2. Dry etching of semiconductors at the nano and micro-scale / S.J. Pearton -- 3. Nanoscale split ring resonator-based metamaterials : fabrication techniques, properties, and applications / Basudev Lahiri ... [et al.] -- 4. Nanofabrication technologies for surface texturing of gallium nitride photonic crystal light-emitting diodes / Faiz Rahman ... [et al.] -- 5. On-film formation of nanowires : a route to defect-free nanowire growth and device fabrication / Jin-Seo Noh ... [et al.] -- 6. Nanotrenches : an optical lithography process for high-aspect-ratio sub-100 nm gaps / Jean-Francois Dayen, Vina Faramarzi, and Bernard Doudin -- 7. High-aspect-ratio metallic nanostructures for transparent electrodes / Joong-Mok Park ... [et al.] -- 8. Fabrication of nanogap electrodes by electroless- and electro deposition / Luis De Los Santos Valladares ... [et al.] -- 9. Nanometer-scale processing by tribological action and its potential applications / Shojiro Miyake and Mei Wang -- 10. Nanomaterial integration on CMOS platform / Sumita Santra, Prasanta Kumar Guha, and Florin Udrea -- 11. Focused ion beam fabrication of metallic nanostructures / Michal Urbǹek and Tom?̀ ?ikola -- 12. Nanotechnology showcase.