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Cover image for Plasma electronics : applications in microelectronic device fabrication
Plasma electronics : applications in microelectronic device fabrication
Author 
Makabe, T. (Toshiaki), author. Petrovic, Z.
Preferred Shelf Number 
TA2020 .M35 2006
Electronic Access 
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2. 
Cover image for Industrial plasma engineering, Volume 1, Principles
Industrial plasma engineering, Volume 1, Principles
Author 
Roth, J. Reece, author.
Preferred Shelf Number 
TA2020
Electronic Access 
Taylor & Francis https://www.taylorfrancis.com/books/9780367802615
OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf
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