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Subject: Plasma etching.

Author

Köhler, J. M. (J. Michael), 1956-

(2)

D'Agostino, Riccardo.

(1)

Flamm, Daniel L.

(1)

John Wiley & Sons.

(1)

Lichtenberg, Allan J.

(1)

Lieberman, M. A. (Michael A.)

(1)

Manos, Dennis M.

(1)

Posseme, Nicolas, editor.

(1)

Powell, Ronald A.

(1)

Wiley InterScience (Online service)

(1)

Wüthrich, Rolf.

(1)

Language

(7)

(1)

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-

(1)

(1)

(1)

(1)

(1)

(1)

(1)

(1)

Subject

Masks (Electronics)

(2)

Microlithography.

(2)

Electric discharges -- Industrial applications.

(1)

Electrochemical cutting.

(1)

Electronic books.

(1)

Metal oxide semiconductors, Complementary.

(1)

Micromachining.

(1)

Plasma chemistry -- Industrial applications.

(1)

Plasma dynamics.

(1)

Plasma engineering.

(1)

Plasma polymerization.

(1)

(1)

(1)

(1)

(1)

Semiconductors -- Etching.

(1)

Thin films -- Surfaces.

(1)

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1.

Cover image for Plasma etching an introduction

Plasma etching an introduction

Plasma etching an introduction

Author

Manos, Dennis M. Flamm, Daniel L.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9780124693708

Format:

Availability

Online Library~1

Available:
Copies:

2.

Cover image for Plasma deposition, treatment, and etching of polymers

Plasma deposition, treatment, and etching of polymers

Plasma deposition, treatment, and etching of polymers

Author

D'Agostino, Riccardo.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9780122004308

Format:

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Online Library~1

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3.

Cover image for Plasma etching processes for CMOS device realization

Plasma etching processes for CMOS device realization

Plasma etching processes for CMOS device realization

Author

Posseme, Nicolas, editor.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9781785480966

Format:

Availability

Online Library~1

Available:
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4.

Cover image for Principles of plasma discharges and materials processing

Principles of plasma discharges and materials processing

Principles of plasma discharges and materials processing

Author

Lieberman, M. A. (Michael A.) Lichtenberg, Allan J.

Preferred Shelf Number

ONLINE

Electronic Access

Full text available from Wiley InterScience
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=227410
John Wiley http://dx.doi.org/10.1002/0471724254
http://www3.interscience.wiley.com/cgi-bin/bookhome/109880578
Contributor biographical information http://catdir.loc.gov/catdir/enhancements/fy0618/2004058503-b.html

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5.

Cover image for Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving

Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving

Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving

Author

Wüthrich, Rolf.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9780815515876

Format:

Availability

Online Library~1

Available:
Copies:

6.

Cover image for Etching in microsystem technology

Etching in microsystem technology

Etching in microsystem technology

Author

Köhler, J. M. (J. Michael), 1956- Wiley InterScience (Online service)

Preferred Shelf Number

ONLINE

Electronic Access

John Wiley http://dx.doi.org/10.1002/9783527613786

Format:

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Online Library~1

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7.

Cover image for Ätzverfahren für die Mikrotechnik

Ätzverfahren für die Mikrotechnik

Ätzverfahren für die Mikrotechnik

Author

Köhler, J. M. (J. Michael), 1956- John Wiley & Sons.

Preferred Shelf Number

ONLINE

Electronic Access

John Wiley http://dx.doi.org/10.1002/3527602917

Format:

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Online Library~1

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8.

Cover image for Dry etching for microelectronics

Dry etching for microelectronics

Dry etching for microelectronics

Author

Powell, Ronald A.

Preferred Shelf Number

ONLINE

Electronic Access

ScienceDirect http://www.sciencedirect.com/science/book/9780444869050

Format:

Availability

Online Library~1

Available:
Copies:

1

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