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Cover image for Plasma etching processes for CMOS device realization
Plasma etching processes for CMOS device realization
Author 
Posseme, Nicolas, editor.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9781785480966
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2. 
Cover image for Dry etching for microelectronics
Dry etching for microelectronics
Author 
Powell, Ronald A.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780444869050
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Online Library~1
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