Title:
Silicon Wafer Bonding Technology for VLSI and MEMS Applications
Author:
Iyer, S. S., ed.
ISBN:
9781849193702
Publication Information:
Stevenage : IET, 2002.
Physical Description:
1 online resource (175 p.)
Series:
Circuits, Devices and Systems
Series Title:
Circuits, Devices and Systems
Electronic Access:
http://dx.doi.org/10.1049/PBEP001ECopies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 247777-1001 | ONLINE | Searching... | Searching... |